PANews 7月27日消息，据The Information报道，上海一家国资背景公司已开始小批量生产国产浸没式DUV光刻机，今年计划出货约5台，2027年增至约20台。首批设备将交付中芯国际、华虹半导体和长鑫科技，晶圆厂需验证精度、稳定性及与现有产线的衔接，流程或持续数月甚至更久。报道称，该设备多数部件已国产化，但部分关键零部件仍依赖日本，整体性能和制造质量仍落后ASML，而ASML在2025年单年交付的浸没式DUV光刻机约为131台，国产设备距离大规模替代仍有差距。
国产浸没式DUV光刻机开始小批量生产，今年首批量产5台
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